Semiconductor wafer buffer coating resins
SUMIRESIN EXCEL® CRC-8000 SERIES
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The SUMIRESIN EXCEL® CRC-8000 SERIES is a range of photosensitive
semiconductor coating materials which demonstrate the following outstanding properties:
High resolution
Environmental safety
Substantial reduction of total cost
High adhesion properties to molding compounds and substrate materials
Superior film properties
Representative grades [CRC-8300 SERIES]
Applications
Semiconductor wafer buffer coating.
Positive Photosensitive resins for buffer coating
SUMIRESIN EXCEL® CRC-8300 SERIES
ITEM
Conditioning
Unit
Value
Test Method
Tensile strength
Room temp.
kg/mm2
12
JIS K 6760
Tensile modulus of elasticity
Room temp.
kg/mm2
280
JIS K 6760
Tensile elongation
Room temp.
%
65
JIS K 6760
Volume resistivity
(1MHz)
Room temp.
Ω-cm
1×1016
JIS C 6481
Dielectric constant
(1MHz)
Room temp.
-
2.9
JIS C 6481
Dissipation factor
(1MHz)
Room temp.
-
0.010
JIS C 6481
Dielectric strength
Room temp.
KV/mm
260
ASTM D 149
Thermal decomposition
Temperature
Temp. raising rate 5°C/min
°C
550
Differential thermobalance TGA
Water absorption
Room temp. 24hr
%
0.3
JIS K 6911
Adhesion to SiO2
After PCT
Delaminated number/ total number
0/100
JIS D 0202
High resolution (CRC-8300)
From right to left 4, 3, 2, 1.5 and 1µm wide lines